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R R Khakimov

1PUBLICATIONS

7CO-AUTHORS

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Publications (1)

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|Nov 30, 2019

Temperature controlled Ru and RuO<sub>2</sub> growth via O<sup>*</sup> radical-enhanced atomic layer deposition with Ru(EtCp)<sub>2</sub>.

M G Kozodaev, Y Y Lebedinskii, A G Chernikova

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Frequent Collaborators

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M G Kozodaev

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Y Y Lebedinskii

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A G Chernikova

1 joint publications

E V Korostylev

1 joint publications

A A Chouprik

1 joint publications

Andrey M Markeev

1 joint publications

C S Hwang

Frequent Collaborators

1 joint publications

M G Kozodaev

1 joint publications

Y Y Lebedinskii

1 joint publications

A G Chernikova

1 joint publications

E V Korostylev

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