Cara-Lena Nies

1PUBLICATIONS
2CO-AUTHORS
Electrical energy storage
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Publications (1)

|Apr 17, 2020
The role of Ru passivation and doping on the barrier and seed layer properties of Ru-modified TaN for copper interconnects.

Suresh Kondati Natarajan, Cara-Lena Nies, Michael Nolan

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Frequent Collaborators

1 joint publications

Suresh Kondati Natarajan

1 joint publications

Michael Nolan