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F Roozeboom

1PUBLICATIONS

1CO-AUTHORS

Terahertz physics

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|Feb 10, 2017

Plasma-assisted atomic layer deposition of conformal Pt films in high aspect ratio trenches.

I J M Erkens, M A Verheijen, H C M Knoops

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H C M Knoops

Frequent Collaborators

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H C M Knoops

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