Jie Shen
2PUBLICATIONS
4CO-AUTHORS

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Publications (2)
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|Dec 18, 2025
Spatial Atomic Layer Deposition of IrO x Using (EtCp)Ir(CHD) and Atmospheric O2/N2 Plasma.Mike L van de Poll, Jie Shen, Paul Poodt
|Feb 19, 2025
Plasma-Enhanced Spatial Atomic Layer Deposition on 2D and 3D Surface Topologies: The Case of Amorphous and Crystalline TiO2.Mike van de Poll, Jie Shen, James Hilfiker
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