Jie Shen

2PUBLICATIONS
4CO-AUTHORS
Electrical energy generation (incl. renewables, excl. photovoltaics)Elemental semiconductors
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Publications (2)

|Dec 18, 2025
Spatial Atomic Layer Deposition of IrO x Using (EtCp)Ir(CHD) and Atmospheric O2/N2 Plasma.

Mike L van de Poll, Jie Shen, Paul Poodt

|Feb 19, 2025
Plasma-Enhanced Spatial Atomic Layer Deposition on 2D and 3D Surface Topologies: The Case of Amorphous and Crystalline TiO2.

Mike van de Poll, Jie Shen, James Hilfiker

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