Steffen Liebermann

1PUBLICATIONS
4CO-AUTHORS
Formal methods for software
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Publications (1)

|Mar 06, 2025
Homogeneity of Electro-Mechanical and Optical Characteristics in Ring-Shaped MEMS Shutter Arrays with Subfield Addressing for Interference Microscopy.

Philipp Kästner, Basma Elsaka, Mustaqim Siddi Que Iskhandar

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Philipp Kästner

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Mustaqim Siddi Que Iskhandar

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Roland Donatiello

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Hartmut Hillmer