Dongmin Yoon

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0CO-AUTHORS
Solid state chemistry
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Publications (1)

|Sep 27, 2025
Selective Etching of Multi-Stacked Epitaxial Si1-xGex on Si Using CF4/N2 and CF4/O2 Plasma Chemistries for 3D Device Applications.

Jihye Kim, Joosung Kang, Dongmin Yoon

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