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Yuli He

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Electrical energy generation (incl. renewables, excl. photovoltaics)

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|Jun 10, 2023

High Performance On-Chip Energy Storage Capacitors with Plasma-Enhanced Atomic Layer-Deposited Hf<sub>0.5</sub>Zr<sub>0.5</sub>O<sub>2</sub>/Al-Doped Hf<sub>0.25</sub>Zr<sub>0.75</sub>O<sub>2</sub> Nanofilms as Dielectrics.

Yuli He, Guang Zheng, Bao Zhu

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