Seunggyu Na

1PUBLICATIONS
8CO-AUTHORS
Chemical and thermal processes in energy and combustion
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Publications (1)

|Mar 28, 2025
Layer-by-layer NH3 plasma treatment for area-selective atomic layer deposition of high-quality SiO2 thin films.

Sanghun Lee, Seunggi Seo, Tae Hyun Kim

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Frequent Collaborators

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Sanghun Lee

1 joint publications

Seunggi Seo

1 joint publications

Hwi Yoon

1 joint publications

Seonyeong Park