Geonwoo Park

1PUBLICATIONS
2CO-AUTHORS
Plasma physics; fusion plasmas; electrical discharges
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Publications (1)

|Aug 27, 2026
Plasma-Side Analysis of Chemical-to-Ion Flux Balance and Ion Energy-Angular Distributions in Ar/O2 Capacitively Coupled Plasmas for MoS2-Relevant Low-Damage Patterning.

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Frequent Collaborators

1 joint publications

Cheol Woong Kim

1 joint publications

Hae June Lee