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Generación de luz espacialmente coherente en longitudes de onda ultravioleta extremas
Randy A Bartels1, Ariel Paul, Hans Green
1Department of Physics and JILA, University of Colorado and National Institute of Standards and Technology, Boulder, CO 80309-0440, USA.
Science (New York, N.Y.)
|July 20, 2002
Resumen
Conseguimos una luz ultravioleta extrema (UVE) altamente coherente espacialmente utilizando una conversión ascendente de alta armonía. Esta fuente de EUV similar a un láser permite aplicaciones avanzadas como la holografía y la microscopía de resolución nanométrica.
Área de la Ciencia:
- Física atómica, molecular y óptica.
- La óptica cuántica es una óptica cuántica.
- Física del láser Física del láser
Sus antecedentes:
- La generación de luz ultravioleta extrema (UVE) espacialmente coherente es crucial para la obtención de imágenes avanzadas y la metrología.
- Las fuentes de EUV existentes a menudo carecen de la coherencia requerida o requieren configuraciones complejas a gran escala.
- La generación de alta armonía (HHG) ofrece un camino hacia fuentes de EUV compactas y de alto brillo.
Objetivo del estudio:
- Para medir y caracterizar la coherencia espacial de la luz EUV generada a través de la alta conversión armónica ascendente.
- Para demostrar la viabilidad de la holografía EUV utilizando una configuración experimental de mesa.
- Para resaltar las aplicaciones potenciales de esta fuente coherente de EUV.
Principales métodos:
- Luz EUV generada mediante la conversión hacia arriba de un láser de femtosegundo utilizando la generación de alta armonía en una fibra hueca de coincidencia de fase.
- Se midieron las propiedades de coherencia espacial del haz de EUV generado.
- Grabó hologramas Gabor de objetos microscópicos para demostrar la coherencia.
Principales resultados:
- El haz de EUV generado exhibió esencialmente plena coherencia espacial.
- Demostró con éxito la holografía EUV de objetos pequeños.
- La fuente de EUV mostró una baja divergencia, característica de un haz similar a un láser.
Conclusiones:
- Una configuración experimental de mesa puede producir luz EUV altamente coherente desde el punto de vista espacial.
- Esta fuente de EUV coherente es adecuada para la metrología de alta precisión, la inspección de componentes de litografía EUV, y la microscopía y la holografía de resolución nanométrica.
- La duración del pulso de femtosegundos permite técnicas de imágenes de ultra alta resolución de tiempo.
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