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Camilla H Sørensen¹, Magnus V Nielsen¹, Sander J Linde¹

¹Department of Physics, Technical University of Denmark, Kongens Lyngby, Denmark.

Nature protocols

|September 5, 2025

Resumen

Desarrollamos FunFit, un software de código abierto para analizar datos de microscopía de sonda de barrido, permitiendo la fabricación precisa a nanoescala de superficies funcionales. Esta herramienta mejora la reproducibilidad para el patronaje y la caracterización de materiales avanzados.

Área de la Ciencia:

Ciencias de los materiales
Nanotecnología
Ciencias de la superficie

Sus antecedentes:

La microscopía de sonda de barrido (SPM) permite la caracterización de la superficie a nanoescala.
La litografía por barrido térmico (tSPL) esculpe con precisión películas de polímero con una precisión nanométrica.
El análisis estándar de SPM carece de herramientas para ajustar funciones matemáticas a datos topográficos complejos.

Objetivo del estudio:

Introducir FunFit, un paquete de software de código abierto para ajustar funciones analíticas a los conjuntos de datos SPM.
Desarrollar y demostrar un protocolo de fabricación y caracterización utilizando tSPL y FunFit.
Mejorar el análisis, la reproducibilidad y el desarrollo de procesos para la nanofabricación basada en SPM.

Principales métodos:

Se utiliza la litografía de sonda de barrido térmico (tSPL) para el patroneado a nanoescala de resistencias poliméricas.
Se utiliza el grabado reactivo de iones para transferir patrones de polímero a copos hexagonales de nitruro de boro (hBN).
Aplicó el software FunFit para la corrección de artefactos, el ajuste de funciones analíticas y la comparación de datos de SPM y microscopía de fuerza atómica (AFM).

Principales resultados:

Paisajes en nanoescala periódicos y cuasi periódicos con patrones exitosos en polímero y hBN.
Se ha demostrado la transferencia de patrones de alta fidelidad del polímero al hBN.
Valida la capacidad de FunFit para corregir artefactos y ajustar conjuntos de datos, proporcionando retroalimentación para la fabricación.

Conclusiones:

El software FunFit y el protocolo asociado mejoran significativamente el análisis y la reproducibilidad de los experimentos SPM.
Este enfoque facilita la creación de superficies sofisticadas y definidas matemáticamente a nanoescala para diversas aplicaciones tecnológicas.
El protocolo es eficiente, se puede completar en un día laborable, lo que hace que el análisis avanzado de SPM sea accesible.

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