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Láseres de cavidad vertical de emisión superficial (VCSEL) MEMS bidireccionales de 1310 nm de alta velocidad y

Masoud Payandeh, Hitesh Kumar Sahoo, Arnhold Simonsen

|December 19, 2025

Resumen

Desarrollamos nuevos VCSEL sintonizables de 1310 nm (láseres de emisión superficial de cavidad vertical) que utilizan tecnología de sistemas microelectromecánicos (MEMS). Estos VCSEL MEMS ofrecen velocidades de barrido de MHz y amplias gamas de sintonización, ideales para la tomografía de coherencia óptica (OCT).

Conclusiones:

Se demostraron con éxito VCSEL MEMS bidireccionales de 1310 nm en una plataforma de silicio.
Los VCSEL MEMS desarrollados exhiben amplios rangos de sintonización y altas velocidades de barrido, adecuados para OCT.
La configuración del dispositivo impacta significativamente el rango de sintonización y el rendimiento.

Palabras clave:

VCSEL MEMS OCT láser sintonizable fotónica de silicio láser de 1310 nm

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