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Updated: Jul 2, 2026

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Pellículas con Patrones de Agujeros: Un Enfoque Estructural para Mejorar la Transmitancia y el Comportamiento

Haneul Kim1,2, Jungyeon Kim1, Young Woo Kang1,2

  • 1Division of Materials Science and Engineering, Hanyang University, Seoul 04763, Republic of Korea.

Materials (Basel, Switzerland)
|January 10, 2026
PubMed
Resumen

Un nuevo diseño de película con patrones de agujeros mejora la litografía de ultravioleta extremo (EUV) al aumentar la transmitancia y la estabilidad mecánica. Este enfoque geométrico ofrece una nueva vía para la optimización de películas más allá de los métodos tradicionales.

Palabras clave:
prueba de abultamientoultravioleta extremomembrana con patrones de agujerossimulación de imágenespelículaestructura porosatransmitancia

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