Video Experimental Relacionado

Updated: Jan 28, 2026

Fabrication of 3D Carbon Microelectromechanical Systems C-MEMS
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Fabrication of 3D Carbon Microelectromechanical Systems C-MEMS

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Tecnología de Patrones de Autoensamblaje a Nivel de Oblea y Pasivación de Interfaz para Chips de Detección MEMS

Zheng Zhang1, Yanlin Zhang1, Yuanyuan Luo2

  • 1School of Integrated Circuits, Huazhong University of Science and Technology, Wuhan, 430074, People's Republic of China.

Nano-micro letters
|January 26, 2026
PubMed
Resumen

Un nuevo proceso de fabricación a nivel de oblea permite la integración de nanomateriales en sistemas microelectromecánicos (MEMS) para la detección química de alto rendimiento. Este avance facilita la fabricación fiable de sensores MEMS avanzados en una oblea de 8 pulgadas.

Palabras clave:
Fabricación compatibleTecnología de patrones de pasivación de interfazMEMSChips de detecciónAutoensamblaje a nivel de oblea

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