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Updated: Jan 28, 2026

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Patterning via Optical Saturable Transitions - Fabrication and Characterization
Published on: December 11, 2014
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Regulación de Pulsos de la Transición Oxidación-Grabado para Patrones Superficiales Controlables con Precisión a
Qi Sun1, Bingchun Jia1, Sidong Wu1
1State Key Laboratory of Fluid Power and Mechatronic Systems, Zhejiang University, Hangzhou, Zhejiang Province 310058, China.
ACS applied materials & interfaces
|January 27, 2026
Resumen
La polarización pulsada permite un control preciso de la oxidación y el grabado a nivel atómico en superficies de carburo de silicio. Este avance en la litografía de sonda de barrido ofrece nuevas vías para la fabricación de dispositivos semiconductores avanzados.
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