Regulación de Pulsos de la Transición Oxidación-Grabado para Patrones Superficiales Controlables con Precisión a

Qi Sun1, Bingchun Jia1, Sidong Wu1

  • 1State Key Laboratory of Fluid Power and Mechatronic Systems, Zhejiang University, Hangzhou, Zhejiang Province 310058, China.

PubMed
Resumen

La polarización pulsada permite un control preciso de la oxidación y el grabado a nivel atómico en superficies de carburo de silicio. Este avance en la litografía de sonda de barrido ofrece nuevas vías para la fabricación de dispositivos semiconductores avanzados.

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