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Updated: Feb 14, 2026

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BWD-DETR: Un Marco Robusto para la Detección de Defectos en Obleas con Campo Brillante

Ruilou Zhang1,2,3, Xiangji Guo1,2, Yuankang Xu1,2

  • 1Hangzhou Institute for Advanced Study, University of Chinese Academy of Sciences, Hangzhou 310024, China.

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|February 13, 2026
PubMed
Resumen

Este estudio presenta BWD-DETR, un nuevo marco para detectar pequeños defectos en la superficie de obleas utilizando imágenes de campo brillante. El método mejora significativamente la detección de defectos submicrométricos, aumentando la precisión en la fabricación de semiconductores.

Palabras clave:
imagen de campo brillantedetección de defectosoblea

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Área de la Ciencia:

  • Fabricación de semiconductores
  • Inspección óptica
  • Visión por computadora

Sus antecedentes:

  • La imagen óptica de campo brillante es estándar para la detección de defectos en obleas.
  • Los pequeños defectos de partículas en obleas con patrones son un desafío debido al ruido de fondo y la textura.
  • Los métodos existentes tienen dificultades con la detectabilidad y la precisión de posicionamiento de defectos submicrométricos.

Objetivo del estudio:

  • Desarrollar un marco de detección avanzado para defectos en la superficie de obleas bajo imágenes de campo brillante.
  • Mejorar la precisión de detección y posicionamiento de defectos pequeños y submicrométricos.
  • Superar las limitaciones de las técnicas actuales de imagen de campo brillante.

Principales métodos:

  • Se propuso el marco BWD-DETR basado en la línea base RT-DETR.
  • Integración de una red troncal de wavelet para una extracción de características mejorada.
  • Inclusión de módulos SMFI y CAS-Fusion para un procesamiento mejorado de la señal de defectos.

Principales resultados:

  • Se logró un 96,56 % de AP50 y un 54,94 % de AP50:95 en la detección de defectos de obleas con campo brillante.
  • Se demostraron mejoras de rendimiento del 1,64 % (AP50) y del 2,17 % (AP50:95) con respecto a la línea base.
  • Se mejoraron con éxito las capacidades de detección de defectos submicrométricos.

Conclusiones:

  • El marco BWD-DETR ofrece un rendimiento superior para la detección de defectos de obleas con campo brillante.
  • El método propuesto aborda eficazmente los desafíos que plantean los defectos pequeños y los fondos complejos.
  • Este enfoque avanza la inspección automatizada en la fabricación de semiconductores.