Resonadores de onda acústica de cuerpo en modo lateral habilitaron la fabricación de matrices de nanostructuras tridimensionales

The precise fabrication of three-dimensional (3D) surface nano-topographies remains a significant challenge in advanced manufacturing. Conventional acoustic methods are inherently limited by wavelength-dependent resolution and primarily restricted to two-dimensional (2D) patterning. Here, we demonstrate a novel fabrication strategy based on the enhanced lateral mode of solidly mounted resonator (SMR), which enables the customizable, area-specific fabrication of periodic 3D surface nanostructures. By harnessing Lamb wave propagation and acoustofluidic effects, we fabricate surface nanostructure arrays with vertical feature sizes below 200 nm and inter-feature spacing controlled to within 5 µm. Compared with conventional surface acoustic wave (SAW) methods, this technique improves precision by overcoming wavelength-imposed limitations, while also allowing the rapid generation of diverse, customizable architectures without the need for complex transducer arrays. Furthermore, by tuning the device geometry, nanostructures with diverse symmetries-including circular, square, hexagonal, and octagonal-can be fabricated in less than 10 s. This work establishes a rapid, efficient, and maskless route for generating high-fidelity nanotopography for large-scale replication, holding significant potential for applications in advanced manufacturing, biomedicine, microelectronics, and photonic devices.