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Updated: Jul 17, 2026

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Reconstrucción 3D y simulación del perfil de grabado para el efecto de área activa oscilante en la fabricación de

Ziyi Hu1,2, Jing Wen1, Chaoran Yang1,2,3

  • 1State Key Laboratory of Fabrication Technologies for Integrated Circuits, Institute of Microelectronics, Chinese Academy of Sciences, Beijing, China.

Communications engineering
|March 1, 2026
PubMed
Resumen

Los investigadores investigaron el defecto de "área activa oscilante" (AA) en la fabricación de memoria de acceso aleatorio dinámico (DRAM). La optimización del flujo de oxígeno durante el grabado por plasma mejoró significativamente la integridad estructural del AA y la fiabilidad del dispositivo DRAM.

Palabras clave:
memoria de acceso aleatorio dinámicofabricación de semiconductoresgrabado por plasmadefectos de fabricaciónreconstrucción 3Dmodelado de dispositivos

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