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光学的に定義された,光学的に敏感な薄膜シリカメソフェーズの多機能パターニング
1Department of Chemical and Nuclear Engineering and Center for Micro-Engineered Materials, Advanced Materials Laboratory, University of New Mexico, 1001 University Boulevard SE, Albuquerque, NM 87106, USA.
Science (New York, N.Y.)
|October 6, 2000
まとめ
この研究では,内蔵された光酸生成器を備えた光敏感フィルムを導入しています. これらのフィルムは,材料の構造と機能の正確な光学制御を可能にし,高度なデバイスでのアプリケーションを可能にします.
科学分野:
- マテリアルサイエンス 材料科学
- ナノテクノロジー ナノテクノロジー
- フォトケミストリー フォトケミストリー
背景:
- 調節可能な性質を持つ先進的な材料の開発は,次世代の技術にとって極めて重要です.
- ナノスケールでの材料構造の制御は,正確な機能化を可能にします.
研究 の 目的:
- 制御可能な構造的および機能的特性を有する光敏感フィルムを作成します.
- パターニングのためのシリカ表面活性物質メソフェーズ内の分子光酸発生器の使用を調査する.
主な方法:
- 光敏感フィルムを準備するために,蒸発誘導による自己組み立てプロセス.
- シリカ表面活性物質メソフェーズ内の分子光酸生成体の分割.
- 紫外線 (UV) 曝露は局所的な酸触媒サイロキサン濃縮を誘発する.
主要な成果:
- フィルムに未曝露の領域を選択的にエッチングする.
- 灰色の尺度で,屈折率,毛穴の大きさ,表面積,濡れる行動のパターンが示されています.
- フィルム内のメソフェーズ変換 (六角形から四角形) を光学的に制御する.
結論:
- マクロ・メソスケールでの構造と機能を光学的に定義し,制御することは可能である.
- これらの光敏感フィルムは,センサー配列,ナノ原子炉,光子および流体装置,および低ダイエレクトリック常数フィルムにとって有望です.
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