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Updated: Jun 26, 2026

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シリコンの何ナノメートルの厚さのチタンの炭酸ガスの層を通って水素の拡散のスペクトロスコーピーの証拠

Semyon Bocharov1, Andrew V Teplyakov

  • 1Department of Chemistry and Biochemistry, University of Delaware, Newark, Delaware 19716, USA.

Journal of the American Chemical Society
|June 12, 2003
PubMed
まとめ

タイタン炭化水素 (TiCN) の薄膜を通して原子水素の拡散が研究されました. TiCN層は,チタンベースの拡散バリアが通常失敗する温度で水素脱吸収を示し,TiCNバリアの潜在的な制限を示した.

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