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Updated: Jul 13, 2026

Fabrication of Uniform Nanoscale Cavities via Silicon Direct Wafer Bonding
10:32

Fabrication of Uniform Nanoscale Cavities via Silicon Direct Wafer Bonding

Published on: January 9, 2014

材料科学:ダイヤモンド・ウェーバーへの道

S T Lee, Y Lifshitz

    Nature
    |August 2, 2003
    PubMed
    まとめ

    No abstract available in PubMed .

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    Last Updated: Jul 13, 2026

    Fabrication of Uniform Nanoscale Cavities via Silicon Direct Wafer Bonding
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    Published on: January 9, 2014

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