1,/20.

Linjie Li1, Rafael R Gattass, Erez Gershgoren

  • 1Department of Chemistry and Biochemistry, University of Maryland, College Park, MD 20742, USA.

Science (New York, N.Y.)
|April 11, 2009
PubMed
まとめ

この研究では,クロスリンクのためのマルチフォトン吸収と無効化のための1フォトン吸収を用いた新しいフォトリトグラフィー技術が導入されています. この方法は,スケーラブルなサブ波長特征の製造を実現し,高度な2Dおよび3Dナノ構造の製造を可能にします.

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