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シリコンの結晶化過程における液体多形化の役割

Caroline Desgranges1, Jerome Delhommelle

  • 1Department of Chemistry, University of North Dakota, Grand Forks, North Dakota 58201, USA.

Journal of the American Chemical Society
|February 17, 2011
PubMed
まとめ

シリコン結晶化は,高密度液体 (HDL) 段階内で形成される低密度液体ポリモルフ (LDL) によって推進されます. この液体ポリモルフ経路は,結晶核形成のエネルギーバリアを大幅に低下させます.

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