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周期的なマイクロ加工シリコン表面のオルガンパイプ放射モード

Peter J Hesketh, Jay N Zemel, Benjamin Gebhart

|March 9, 2018

まとめ

この研究では,400°Cのシリコングリットの赤外線スペクトル放射を調査した. 研究者らは共鳴周期を観測し,グリットスロット内の静止波が,熱気圧計の性能に影響を与えることを示唆しました.

科学分野:

物理学
材料科学
ナノテクノロジー

背景:

標準的な熱伝達モデルは,荒らされた表面の熱気量計の実験データと不一致を示している.
熱伝送におけるマイクロ/ナノ構造物の役割の調査は,アネモメーターの精度を向上させるために極めて重要です.

研究の目的:

深層のシリコン格子から放射される赤外線を研究する
格子幾何学と極化が放出特性に与える影響を理解する.

主な方法:

400°Cでの正常,s,およびp偏振スペクトル放出量 (3 μmλ14 μm) の測定
表面の繰り返しスケール (Λ = 10,14,18,22 μm) が異なる四角波格子 (深さ45 μm) 近くを使用した.
分析された格子パラメータ (Λ/λ比) と極化効果.

主要な成果:

~42μmの特徴的な長さを持つsおよびp極化スペクトル放出で顕著な共振周期が観察されました.
空気スロット内の静止波が原因として提案されており,オルガンパイプ共鳴に類似しています.
s-偏振の共振幅は Λ に依存せず,p-偏振は Λ に依存し,その説明は知られていなかった.

結論:

深層のシリコングリッドは,静止波によるスペクトル発射で共鳴する.
この発見は,微細構造的幾何学の影響を受けた熱伝達機構の洞察を提供します.
格子周期性に対する偏極化依存行動を説明するためにさらなる研究が必要である.

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