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Updated: Feb 12, 2026

Use of Sacrificial Nanoparticles to Remove the Effects of Shot-noise in Contact Holes Fabricated by E-beam Lithography
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ショットノイズによる非局所的な熱電子エネルギー分散のイメージング

Qianchun Weng1,2, Susumu Komiyama1,3, Le Yang4

  • 1National Laboratory for Infrared Physics, Shanghai Institute of Technical Physics, The Chinese Academy of Sciences, Shanghai 200083, PR China.

Science (New York, N.Y.)
|March 31, 2018
PubMed
まとめ

研究者らは電子ナノ熱測定法を開発し,マイクロエレクトロニクスにおける熱電子のエネルギー分散をマッピングした. この新しい方法は,格子熱化前の電子エネルギーを視覚化し,非局所的な分散効果を明らかにします.

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