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Updated: Feb 2, 2026

Fabrication and Characterization of High-Q Silicon Nitride Membrane Resonators
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Fabrication and Characterization of High-Q Silicon Nitride Membrane Resonators

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ウェファースケール単結晶六角性ボロンニトリド膜

Joo Song Lee1,2, Soo Ho Choi3, Seok Joon Yun4

  • 1Institute of Advanced Composite Materials, Korea Institute of Science and Technology (KIST), Wanju-Gun, 55324, Republic of Korea.

Science (New York, N.Y.)
|November 17, 2018
PubMed
まとめ

研究者は化学蒸気堆積を用いて,ワファースケール単結晶六角性ボロン窒化物 (SC-hBN) フィルムを合成した. この突破は多結晶 hBN の欠陥を克服し,先進的な電子機器への道を開きます.

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