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Updated: Dec 17, 2025

Negative Additive Manufacturing of Complex Shaped Boron Carbides
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超低流電常 amorphous ボールニトリド

Seokmo Hong1, Chang-Seok Lee2, Min-Hyun Lee2

  • 1Department of Chemistry, Ulsan National Institute of Science and Technology (UNIST), Ulsan, South Korea.

Nature
|June 26, 2020
PubMed
まとめ

研究者は,高度な電子機器のための超薄形状のボロン窒化物フィルムを開発しました. これらのフィルムは,半導体小型化における主要な課題を克服し,優れた低介電定数 (κ) 値と堅固なバリア特性を提供します.

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