MEMS

Zhaoyin Ding1, Yi Zhou2

  • 1Faculty of Engineering, Anhui Sanlian University, Hefei 230601, China.

Micromachines
|August 28, 2025
PubMed
まとめ

マイクロ電機システム (MEMS) のジャイロскопにおけるスケールファクターの非線形性は,重要な課題です. この研究では,スケールファクターの線形性と繰り返し性を大幅に改善し,MEMSジャイロスクープの精度を向上させる新しい補償法が導入されています.

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