関連する実験動画

Updated: May 6, 2026

Real-Time DC-dynamic Biasing Method for Switching Time Improvement in Severely Underdamped Fringing-field Electrostatic MEMS Actuators
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Real-Time DC-dynamic Biasing Method for Switching Time Improvement in Severely Underdamped Fringing-field Electrostatic MEMS Actuators

Published on: August 15, 2014

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MEMSで動作するシリコン・ナトリド・ウェーブガイド光学スイッチの設計と静的分析

Yan Xu1,2, Tsen-Hwang Andrew Lin2, Peiguang Yan1

  • 1College of Physics and Optoelectronic Engineering, Shenzhen University, Shenzhen 518060, China.

Micromachines
|August 28, 2025
PubMed
まとめ

この研究は,酸塩 (Si3N4) の波導体を使用した微電気機械システム (MEMS) の光学スイッチを提示する. この装置は,Si3N4ワイヤーを動かすことでスイッチングを実現し,統合光学のための優れた性能を示しています.

キーワード:
マイクロ電機システム光学スイッチフォトニクスの統合回路シリコンフォトニクス

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