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Updated: Sep 9, 2025

Design and Characterization Methodology for Efficient Wide Range Tunable MEMS Filters
15:25

Design and Characterization Methodology for Efficient Wide Range Tunable MEMS Filters

Published on: February 4, 2018

6.2K

ブロードバンド RF MEMS フィルターにおける性能と結合信頼性の向上のための共振器幅の最適化

Gwanil Jeon1, Minho Jeong1, Shungmoon Lee1

  • 1MISOTECH, 1005, 1006, Dongtan Biz Tower 63-12, Dongtan Cheomdan Saneuop 1-Ro, Hwaseong-si 18469, Republic of Korea.

Micromachines
|August 28, 2025
PubMed
まとめ

周波数マイクロ電気機械システム (RF MEMS) のフィルターにおける共振器幅の最適化により,性能が向上する. 完全な幅のマッチング (L3) は,高度な通信システムのための電気的特性と機械的信頼性を改善しました.

キーワード:
Au-Au結合MEMSについてRFデバイス電磁場最適化についてフィルター信頼性のエンジニアリング共鳴器の設計ストライプライン構造熱圧縮結合ブロードバンド

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Characteristics of Series Resonant Circuit01:24

Characteristics of Series Resonant Circuit

Series resonance occurs in a circuit containing inductive (L), capacitive (C), and resistive (R) elements connected sequentially. At the resonance frequency, the inductive and capacitive reactances are equal in magnitude but opposite in sign, effectively canceling each other. This causes the circuit's impedance is minimal, primarily determined by the resistance R. The resonant frequency of an RLC circuit is defined as:
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Parallel Resonance01:23

Parallel Resonance

The parallel RLC circuit is an arrangement where the resistor (R), inductor (L), and capacitor (C) are all connected to the same nodes and, as a result, share the same voltage across them. The parallel RLC circuit is analyzed in terms of admittance (Y), which reflects the ease with which current can flow. The admittance is given by:
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Series Resonance01:17

Series Resonance

The RLC circuit impedance is defined as the ratio of the supply voltage to the circuit current. Resonance in such a circuit occurs when the imaginary part of this impedance equals zero. This specific condition means that the inductive reactance is exactly equal to the capacitive reactance. The frequency at which this happens is known as the resonant frequency. Mathematically, the resonant frequency is inversely proportional to the square root of the product of the inductance (L) and capacitance...
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Resonance in an AC Circuit01:26

Resonance in an AC Circuit

The property of an inductor makes it resist any change in the current passing through it, while the property of a capacitor is to build up the charge across its terminals. Hence, if an inductor and capacitor are connected in series, they have opposite effects on the relative phase between current and voltage. The current through the circuit undergoes forced oscillation at the frequency of the source. The resistance term in an R-L-C circuit acts as a damping term because power is dissipated...
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Design Example: Underdamped Parallel RLC Circuit

Consider designing an oscillator circuit, a crucial component in various electronic devices and systems. The objective is to create an oscillator circuit with specific characteristics: a damped natural frequency of 4 kHz and a damping factor of 4 radians per second. To accomplish this, a parallel RLC circuit is employed, known for its ability to sustain oscillations at a resonant frequency. In this case, the damping factor is pivotal in achieving the desired performance.
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Design Example01:23

Design Example

The innovation of touch-tone telephony revolutionized the telecommunications industry by replacing the traditional rotary dial with a dual-tone multi-frequency (DTMF) signaling system. This system uses a matrix-style keypad with buttons arranged in four rows and three columns, creating 12 distinct signals each assigned to a pair of frequencies. Each button press results in a simultaneous generation of two sinusoidal tones – one from a low-frequency group (697 to 941 Hz) and one from a...
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