関連する実験動画

Updated: May 5, 2026

Measurement of X-ray Beam Coherence along Multiple Directions Using 2-D Checkerboard Phase Grating
10:39

Measurement of X-ray Beam Coherence along Multiple Directions Using 2-D Checkerboard Phase Grating

Published on: October 11, 2016

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投影式リトグラフィーツールにおける熱制御システム: 総合的なレビュー

Di Cao1, He Dong2, Zhibo Zeng1

  • 1State Key Laboratory of Digital Manufacturing Equipment and Technology, School of Mechanical Science and Engineering, Huazhong University of Science and Technology, Wuhan 430074, China.

Micromachines
|August 28, 2025
PubMed
まとめ

このレビューでは,高度な深紫外線 (DUV) と極紫外線 (EUV) のリトグラフィのための熱制御システムを調査します. これらの重要な半導体製造ツールにおける曝露精度を維持するための熱的課題と解決策を分析しています.

キーワード:
投影式リトグラフィーの道具熱制御アルゴリズム熱制御構造熱制御システム熱変形

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