先進的なTCADシミュレーションとダイナミック検証によるトレンチMOSFETのプレシリコン精密なSPICEモデリング
Ammar Tariq1, Giovanni Minardi2, Valeria Cinnera Martino2
1Department of Mathematical and Computer Sciences, Physical Sciences and Earth Sciences (MIFT), University of Messina, 98166 Messina, Italy.
Micromachines
|August 28, 2025
まとめ
この研究は,TCADシミュレーションを使用してパワーMOSFETのSPICEモデルを抽出するための仮想ワークフローを導入し,物理プロトタイプの必要性を排除します. これは設計サイクルを加速し,ダイナミック特性の精度を改善します.
科学分野:
- 電気工学
- 半導体装置物理学
- コンピュータ電子
背景:
- 伝統的なパワー MOSFET SPICE モデルの抽出は,実験的なシリコンデータに大きく依存し,多くの場合,高価なプロトタイピングの繰り返しが必要です.
- 半導体設計では,デバイスの性能を最適化し,製造前に正確な電気パラメータを確保することが重要な課題です.
- 現存するシミュレーション方法は,物理的な検証なしに精密なダイナミック特性予測に必要な精度が欠けている可能性があります.
研究 の 目的:
- パワー MOSFET の正確な SPICE モデルを抽出するための新しい,完全に仮想的な方法論を提示します.
- 設計者がデバイスの性能を最適化し,TCADシミュレーションから電気パラメータを抽出できるようにする.
- 最初のシリコンプロトタイプの必要性を回避し,開発時間とコストを削減します.
主な方法:
- リアルなパワー MOSFET デバイス構造を生成するために,先進的な TCAD (テクノロジー・コンピュータ・アイド・デザイン) ツールを使用した.
- TCADシミュレーションから直接主要な電気特性を取得した.
- 精密なSPICEモデル抽出とシミュレーションデータに基づくマクロモデルの統合を行いました.
- TCADとSPICEの両方の環境でゲートチャージテストを使用して抽出したSPICEモデルを動的に検証した.
主要な成果:
- QgsとQgdの誤差が2%未満で,ゲートチャージテストのTCADとSPICEシミュレーションの間で優れた一致を達成しました.
- ハードウェア製造前に非常に忠実なデバイスシミュレーションを生成する能力を実証しました.
- 電力MOSFETの正確な電気パラメータを抽出しました. e-フィューズのアプリケーションを含む.
結論:
- 提案された仮想フローは,パワー MOSFETの開発における最初のシリコンプロトタイプの必要性を効果的に回避します.
- この革新的なアプローチは,設計プロセスを大幅に加速し,プロトタイプとデザインの再回転に関連するコストを削減します.
- この方法論は,電動フィューズなどの特定のアプリケーションにおけるMOSFETにとって不可欠な,一時的およびダイナミックな特性の精度を高めます.
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