電子探知器ベースの電子反射散射による結晶学および微細構造のマッピングに関する実用的な検討
Tianbi Zhang1, Ruth M Birch1, Graeme J Francolini1
1Department of Materials Engineering, University of British Columbia, 309-6350 Stores Road, Vancouver, BC V6T 1Z4, Canada.
まとめ
電子顕微鏡で高速で高品質の微細構造分析を行うための最適化された直接電子探知器. この研究は,急速な指向マッピングと高度な電子反射散射 (EBSD) パターン収集の戦略を詳細に説明しています.
科学分野:
- 材料科学
- 分析化学
- 物理学
背景:
- コンパクトの直接電子検出器は,費用対効果の高いマイクロ構造分析のために電子顕微鏡でますます利用されています.
- これらの検出器,特にタイムピックスチップをベースにしたものは,データ取得の強化の機会を提供します.
研究 の 目的:
- 電子顕微鏡で高品質で迅速なデータ収集のための商用直接電子検出器を最適化します.
- 効率的なオリエンテーションマッピングと高度な電子反射散射 (EBSD) パターンの獲得のための戦略を実証する.
主な方法:
- シリコン,ニッケル,Ti-Mo合金,SiC複合物の様々なサンプルを体系的に分析した.
- 低電圧と近距離電流を含む様々な条件下で検出器の性能を調査する.
- EBSD パターンとオリエンテーションマップの収集のための最適化されたプロトコルの開発.
主要な成果:
- 方向図の迅速な収集のための戦略が確立されました.
- 高品質のEBSDパターンが達成され,弾性ストレインマッピングのような高度なアプリケーションに適した.
- 低電圧 (5〜10 keV) と低ビーム電流で効果的なデータ取得が実証されました.
結論:
- 直接電子検出器は,効率的かつ高品質の微細構造分析のために最適化することができます.
- 開発された戦略により,迅速なEBSDデータ収集と高度なパターン分析が可能になります.
- この研究は,電子顕微鏡を用いたアクセシブルで詳細な微細構造の特徴付けを容易にする.
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