先進ナノテクノロジーのESD保護のための予測された超越性能と放電能力を持つP型埋葬層DTSCR
Zhengwei Zhang1, Shupeng Chen2, Hongxia Liu2
1Xidian University School of Electronic Engineering, No. 2 Taibai South Road, Electronic City Street, Xi'an, 710071, CHINA.
Nanotechnology
|September 5, 2025
まとめ
新しいP型埋葬層ダイオードトリガーシリコン制御矯正器 (PBL-DTSCR) は,優れた静電放電 (ESD) 保護を提供します. この新しい装置は,従来の設計と比較して,排出効率を大幅に改善し,オーバーショット電圧を削減し,漏れ電流を低下させます.
科学分野:
- 半導体装置の物理
- 集積回路の設計
- 静電放電 (ESD) 保護
背景:
- 従来のダイオードトリガードシリコン制御矯正器 (DTSCR) は,静電放電 (ESD) の保護効率と超電圧の制限に直面しています.
- 誘発経路の最適化と寄生体の構造の最小化が DTSCR のパフォーマンスを向上させる上で極めて重要です.
研究 の 目的:
- 新しいP型埋葬層ダイオードトリガーシリコン制御矯正器 (PBL-DTSCR) を提案し分析する.
- PBL-DTSCRの改善された電気静電放電 (ESD) 保護能力を実証する.
- トリガー電圧,オーバーショット電圧,放電能力,漏れ電流などの主要な性能指標に対する構造変更の影響を評価する.
主な方法:
- 新しい PBL-DTSCR 構造の設計と製造
- P型ESDインプラントとシリシドブロック層を組み込む.
- 寄生体のSCR経路がPNPNからPNPN構造に変化する.
- PBL-DTSCRのレイアウト最適化
主要な成果:
- PBL-DTSCRは,オーバーショット電圧を10.94Vから6.54Vまで40.22%削減しました.
- 従来のDTSCRと比較して,放電能力は1. 75倍 (1. 06Aから1. 86A) 増加しました.
- 漏れ電流は99. 7% (69. 47nAから 0. 1497nA) 減少した.
- 低トリガー電圧 (2.11V) と高い保持電圧 (2.08V) が得られた.
結論:
- PBL-DTSCRは,静電放電 (ESD) の保護性能を大幅に向上させています.
- 新しい構造は,排出効率を効果的に改善し,重要な故障パラメータを減らす.
- PBL-DTSCRは,半導体デバイスの強固なESD保護のための有望なソリューションであり,漏れを軽減し,設計の柔軟性を提供します.
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