プローブカードリアルタイム監視における欠損センサーデータ補完のための自己注意ベース深層学習

In industrial monitoring of semiconductor probe cards, real-time sensor data acquisition and processing are essential for anomaly detection and predictive maintenance. However, missing data resulting from possible sensor malfunctions present a significant challenge, compromising the integrity of subsequent analyses. The present study addresses this issue by applying and evaluating a state-of-the-art deep learning approach, the Self-Attention-based Imputation for Time Series model, to reconstruct corrupted signals from an industrial sensor network comprising accelerometers and microphones. A rigorous evaluation was conducted against traditional imputation methods and a powerful deep learning comparison method, the Bidirectional Recurrent Imputation for Time Series model, using a comprehensive set of time- and frequency-domain metrics. The results demonstrate that the self-attention model achieves competitive or superior accuracy, with an average improvement of 66% (with values ranging between 25% and 88%) in Mean Absolute Error over traditional methods especially in scenarios with extensive data loss, ensuring high fidelity in the reconstructed signals. The proposed analysis shows that the attention-based architecture offers a substantial practical advantage, completing training per epoch more than twenty times faster than the recurrent-based comparison method. This balance of high performance and computational efficiency makes the self-attention framework a robust and pragmatic solution to achieve data integrity in demanding monitoring and management systems.