レーザー支援電析法におけるプロセス中焼結時のビームスポット振動によるヤング率の大幅な向上

We developed an in-process sintering method using beam spot oscillations in laser-assisted electrophoretic deposition to increase the Young's moduli of fabricated Au micropillar structures. Layer defects, which are typically observed in structures fabricated through in-process sintering without beam spot oscillations, were successfully eliminated by oscillating the beam spot during sintering. Micropillars fabricated using this method can be post-annealed without deformation, resulting in significant improvements in their Young's moduli. Specifically, the Young's modulus of the Au micropillars reached 76.2 GPa following the post-annealing of structures fabricated through this in-process beam spot oscillation technique.