Tomonori Nakano1, Yu Yamazawa2

  • 1Hitachi, Ltd Research & Development Group, 1-280 Higashi-Koigakubo, Kokubunji-shi, 185-8601, Japan.

PubMed
まとめ

新しいワイヤー収差補正器が電子顕微鏡イメージングを強化します。このコンパクトで費用対効果の高いデバイスは、収差を補正することにより、走査型電子顕微鏡(SEM)の解像度を向上させます。

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