高Q値・コンパクトな薄膜ニオブ酸リチウム導波路型ファブリ・ペローマイクロ共振器

Thin-film lithium niobate (TFLN) has played a pivotal role in the advancement of integrated photonics, by supporting a diverse range of applications including nonlinear optics, electro-optics, and piezo-optomechanics. The effective realization and enhancement of these interactions rely heavily on the implementation of high quality photonic microresonators. The pursuit of novel resonator architectures with optimized properties thus represents a central research area in TFLN photonics. In this work, we design and fabricate TFLN Fabry-Perot microresonators, by placing a straight section of waveguide between a pair of tapered photonic crystal mirrors. The resonator features a high quality factor of 6 × 10⁵ at 1,530 nm and a compact length of 100 µm. The functionality of the device is further demonstrated by integrating on-chip electrodes for high-frequency piezo-optomechanical modulation. Our device can serve as an appealing candidate for developing high-performance photonic components on the TFLN platform.