ミリメートル級MEMSアクチュエータ:マルチフォールデッドビームと有害モード抑制構造
Hangyu Zhou1, Wei Bian2, Rui You1
1School of Instrument Science and Optoelectronics Engineering, Beijing Information Science & Technology University, Beijing 100192, China.
Micromachines
|January 28, 2026
まとめ
光学インターコネクト用の新しいMEMS電磁アクチュエータを開発しました。差動運動拒絶ユニットを統合することで、大きなストロークと高い安定性を実現し、寄生運動とクロストークを大幅に低減します。
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