シンプルな電極共平面構造を用いた自己発電型電気化学圧力センサーの圧力センシング性能の向上

In recent years, electrochemical pressure (ECP) sensors with self-powered and both dynamic and static pressure detection capabilities have received widespread attention. To improve pressure sensing performances while reducing the thickness of conventional sandwich structure ECP sensors, we propose an ECP sensor with a simple electrode coplanar structure. Specifically, it consists of Cu/Zn foil electrodes and LiCl/polyvinyl alcohol (PVA) modified filter paper. Among them, the Cu/Zn coplanar electrodes are used for redox reactions, the LiCl provides conductive ions, and the PVA is used to provide a humid environment to promote the ionization and conduction of LiCl. The rough surface microstructure of the filter paper is used to enhance the pressure sensing performances of the sensor. The results show that the ECP sensor with an electrode coplanar structure can spontaneously output current in the pressure range of 0.4-100 kPa, with sensitivities of 0.273 kPa^-1 (0.6-20 kPa) and 0.036 kPa^-1 (20-100 kPa). Specifically, compared to ECP sensors with a sandwich structure, it has a wider response range and higher sensitivity. Through the current response, morphological characterizations, and redox reactions, the pressure sensing mechanism is elucidated. Furthermore, the proposed ECP sensor can be used for respiratory state recognition combined with machine learning. This research provides a new approach for developing a high-performance ECP sensor with a simple electrode coplanar structure.