関連する実験動画

Updated: Feb 14, 2026

Light Enhanced Hydrofluoric Acid Passivation: A Sensitive Technique for Detecting Bulk Silicon Defects
09:15

Light Enhanced Hydrofluoric Acid Passivation: A Sensitive Technique for Detecting Bulk Silicon Defects

Published on: January 4, 2016

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BWD-DETR: ライトフィールド・ウェーファー・デフェクト検出のための堅牢なフレームワーク

Ruilou Zhang1,2,3, Xiangji Guo1,2, Yuankang Xu1,2

  • 1Hangzhou Institute for Advanced Study, University of Chinese Academy of Sciences, Hangzhou 310024, China.

Sensors (Basel, Switzerland)
|February 13, 2026
PubMed
まとめ

この研究は,BWD-DETRを導入し,明るいフィールドイメージングを使用して小さな円盤表面の欠陥を検出するための新しいフレームワークである. この方法は,サブミクロンの欠陥の検出を大幅に改善し,半導体製造における精度を高めます.

キーワード:
明るいフィールドイメージングデフォルト検出 デフォルト検出 デフォルト検出ウェッファー (Wafer) とは,ウェッファー (Wafer) とは,ウェッファーのことです.

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