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Updated: Feb 15, 2026

Fabrication of an Optical Cell Dryer for the Spectroscopic Analysis Cells
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卓越した紫外線の光学特性を探査するための卓上スペクトロスコピックエリプソメトリー

I-Hsueh Li, Yu-Zhi Fu, Yi-Ting Lee

    Optics letters
    |February 13, 2026
    PubMed
    まとめ

    私たちは,高ハーモニック生成 (HHG) ソースを使用して,極紫外線 (EUV) スペクトロスコピックエリプソメトリー (SE) を開発しました. この方法は,Nb2O5,Mo,Auなどの材料の光学定数を正確に決定し,正確なEUV光学分析を可能にします.

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