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Updated: May 4, 2026

Convergent Polishing: A Simple, Rapid, Full Aperture Polishing Process of High Quality Optical Flats & Spheres
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Convergent Polishing: A Simple, Rapid, Full Aperture Polishing Process of High Quality Optical Flats & Spheres

Published on: December 1, 2014

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化学機械研磨に使用されるセリアベースの材料の分類,性能およびリサイクル

Meiwen Tie1, Yifei Wang1, Cheng Zhang2

  • 1Beijing Key Laboratory of Function Materials for Molecule & Structure Construction, School of Materials Science and Engineering, University of Science and Technology Beijing, Beijing 100083, P. R. China. xiubinghuang@ustb.edu.cn.

Nanoscale
|February 17, 2026
PubMed
まとめ

セリア (CeO2) ベースの材料は,超精密製造のための化学機械研磨 (CMP) の主要な磨き材料です. 研究は,より優れた性能のための材料システムと合成を進歩させていますが,ナノスケール制御と環境への影響は依然として課題です.

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