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Micro-masonry for 3D Additive Micromanufacturing
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通过多层软光刻法制造的单质微型和
M A Unger1, H P Chou, T Thorsen
1Department of Applied Physics, California Institute of Technology, Pasadena, CA 91125, USA.
Science (New York, N.Y.)
|February 7, 2001
概括
多层软光刻法可以从弹性体制造复杂的微流体器件. 这种技术显著减少了设备的大小,并保留了传统软刻版的好处.
科学领域:
- 微流体学 微流体学
- 材料科学 材料科学 材料科学
- 生物技术是生物技术.
背景情况:
- 软光刻版为制造微流体设备提供了基于的微加工的替代方案.
- 现有的软光刻技术在创建复杂,多层结构方面是有限的.
研究的目的:
- 引入和演示用于制造先进的微流体系统的多层软光刻法.
- 以展示使用基于弹性体的多层软光刻的活性微流体组件的创作.
主要方法:
- 使用弹性材料模具复制品来创建印章和微流体通道.
- 开发了一种多层方法,用于堆叠软材料,用于复杂的设备制造.
- 在微流体装置内集成的活性元件,如门和.
主要成果:
- 通过使用新技术,成功制造了多层微流体装置.
- 展示了完全由弹性体制成的集成开关,开关和的功能.
- 与基于的设备相比,实现了显著的尺寸缩小 (超过两个数量级).
结论:
- 多层软 lithography 是软 lithography 的一个强大的扩展,用于创建复杂的微流体系统.
- 这种技术允许微型化,活跃的微流体设备,并保留了诸如快速原型和生物相容性等优势.
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