在条纹图案中订购的机制
C Harrison1, D H Adamson, Z Cheng
1Department of Physics, Princeton Materials Institute, Princeton University, Princeton, NJ 08544, USA.
Science (New York, N.Y.)
|November 25, 2000
概括
我们研究了块共聚合物薄膜中的条纹图案的顺序. 主要发现是多个分离线一起消灭,这是理解图案形成和块共聚合物光刻的关键.
科学领域:
- 材料科学 材料科学 材料科学
- 聚合物科学 聚合物科学
- 软物质物理学 软物质物理学
背景情况:
- 块共聚合物在薄膜中形成有序的微域模式.
- 了解这些模式的动态对于纳米石墨等应用至关重要.
- 偏斜是影响模式排序的拓缺陷.
研究的目的:
- 为了研究圆柱体块共聚合物微域在薄膜中的排序动态.
- 为了确定在化过程中出现的偏离式灭绝的主导机制.
- 了解拓约束在模式演变中的作用.
主要方法:
- 时间间隔原子力显微镜被用来追踪偏差.
- 炼是为了诱导订购而进行的.
- 进行了动力缩放规律的分析.
主要成果:
- 观察到一种涉及三或四个偏差 (四极) 的偏差灭绝的主导机制.
- 由于拓约束,对对分离灭绝事件被抑制.
- 观察到的动力缩放规律支持多分离式灭绝事件.
结论:
- 这项研究揭示了对块共聚合物模式的排序动态的关键见解.
- 拓约束显著影响缺陷消灭机制.
- 这些发现有助于对二维图案形成的理解,并阻断共聚合物 lithography 的应用.
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