纳米力学:应力半导体结构应变的反应
Feng Liu1, Paul Rugheimer, E Mateeva
1Department of Materials Science and Engineering, University of Utah, Salt Lake City, Utah 84112, USA.
Nature
|April 5, 2002
概括
晶体揭示了在绝缘体 (SOI) 基板中的令人惊的机械行为. 这项研究发现,SOI材料中底层氧化物层的粘度有明显的局部下降.
科学领域:
- 材料科学 材料科学 材料科学
- 纳米技术 纳米技术
- 半导体物理 半导体物理
背景情况:
- 薄薄膜的纳米机械性能对于半导体设备至关重要.
- 在绝缘体 (SOI) 基板,在绝缘层上设有膜,越来越重要.
- 了解这些薄膜的机械行为对于设备的性能和可靠性至关重要.
研究的目的:
- 为了研究SOI基板中的薄薄膜的纳米机械特性.
- 为了利用晶体作为新的纳米机械应力剂.
- 在SOI结构中揭示出意想不到的机械行为和氧化物特性.
主要方法:
- 采用非常小的晶体作为纳米机械应力器.
- 将这些压力剂应用于SOI基板内的绝缘层上的薄薄膜上.
- 观察和分析由此产生的机械反应和材料性质变化.
主要成果:
- 在SOI基板中展示了薄层令人惊的机械行为.
- 确定了膜下方氧化物层粘度的显著局部降低.
- 提供了对SOI结构内的机械相互作用的新见解.
结论:
- SOI基板的机械行为比以前理解的要复杂得多.
- 绝缘氧化物层的粘度可以在局部显著降低.
- 这些发现对 SOI 基质在先进纳米电子设备中的设计和应用具有重要意义.
相关概念视频
Normal Strain under Axial Loading
Normal strain under axial loading is an important concept in the field of mechanics of materials. Axial loading implies the application of a force along the axis of a material, like a column or bar. This force can either compress or stretch the material. In the context of axial loading, normal strain is the deformation experienced by the material in the direction of the loading force. It's calculated as the change in length divided by the original length of the material. This unitless ratio...
Stress-Strain Diagram - Ductile Materials
The stress-strain relationship in ductile materials such as structural steel or aluminium is intricate and progresses through several stages. When a specimen is loaded, it initially exhibits a linear length increase, depicted by a steep straight line on the stress-strain diagram. It indicates the material is elastically deforming and will return to its original shape once unloaded. However, when a critical stress value is reached, plastic deformation begins. This stage sees substantial...
Shearing Strain
The shearing strain represents a cubic element's angular change when subjected to shearing stress. This type of stress can transform a cube into an oblique parallelepiped without influencing normal strains. The cubic element experiences a significant transformation when exposed solely to shearing stress. Its shape alters from a perfect cube into a rhomboid, clearly demonstrating the effect of shearing strain. The degree of this strain is considered positive if it reduces the angle between the...
Relation between Poisson's ratio, Modulus of Elasticity and Modulus of Rigidity
Deformation occurs in axial and transverse directions when an axial load is applied to a slender bar. This deformation impacts the cubic element within the bar, transforming it into either a rectangular parallelepiped or a rhombus, contingent on its orientation. This transformation process induces shearing strain. Axial loading elicits both shearing and normal strains. Applying an axial load instigates equal normal and shearing stresses on elements oriented at a 45° angle to the load axis.
Measurements of Strain
Strain quantifies the deformation of a material under force, typically measured as normal strain, which represents the change in length when compared with the original length. Electrical strain gauges are used for enhanced accuracy. These devices consist of a conductive wire mounted on a paper backing that adheres to the material's surface. These gauges operate on the piezoresistive effect, where the wire's electrical resistance changes in response to mechanical deformation. The strain gauge...
Elastic Strain Energy for Shearing Stresses
As discussed in previous lessons, strain energy in a material is the energy stored when it is elastically deformed, a concept crucial in materials science and mechanical engineering. This energy results from the internal work done against the cohesive forces within the material. When a material undergoes shearing stress and corresponding shearing strain, the strain energy density, which is the energy stored per unit volume, is calculated. Within the elastic limit, where the stress is...


