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微镜阵列缩小光刻法中的特征连接性:通过单个光罩生成各种图案

Hongkai Wu1, Teri W Odom, George M Whitesides

  • 1Department of Chemistry and Chemical Biology, Harvard University, 12 Oxford Street, Cambridge, Massachusetts 02138, USA.

Journal of the American Chemical Society
|June 20, 2002
PubMed
概括

微镜阵列光刻法 (MAP) 通过控制微镜图像连接和光罩方向,使得从单个面具生成多样化的图案. 这种技术为先进的微型制造创造了多种对称性和周期性.

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