通过碳化物层的光谱证据表明,在上通过几纳米厚的碳化物层扩散
Semyon Bocharov1, Andrew V Teplyakov
1Department of Chemistry and Biochemistry, University of Delaware, Newark, Delaware 19716, USA.
Journal of the American Chemical Society
|June 12, 2003
概括
研究了通过碳化 (TiCN) 薄膜的原子扩散. TiCN 层在基扩散屏障通常失败的温度下显示出溶解,这表明TiCN 屏障的潜在局限性.
科学领域:
- 材料科学 材料科学 材料科学
- 表面科学是一门学科.
- 化学工程是化学工程的重要组成部分.
背景情况:
- 碳化 (TiCN) 是半导体设备中扩散屏障的一个有前途的材料.
- 了解通过TiCN的扩散对于设备的可靠性和性能至关重要.
- 现有的基于Ti的扩散屏障在特定温度范围内经常失败.
研究的目的:
- 为了研究原子通过薄薄的TiCN层的扩散.
- 为了确定暴露下TiCN/Si接口的行为.
- 评估TiCN作为扩散屏障的热稳定性和有效性.
主要方法:
- 使用多重内部反射里埃变换红外光谱法 (MIR-FTIR).
- 还使用了其他补充分析技术.
- 化学蒸汽沉积 (CVD) 用于将TiCN层从四基 (dimethylamino) 沉积到Si100) - 2x1表面.
主要成果:
- 通过10纳米厚的TiCN层成功监测了原子扩散.
- 从TiCN/Si接口观察到的复合性脱吸.
- 脱吸温度范围与大多数基于Ti的扩散屏障的故障点一致.
结论:
- 在临界温度下,TiCN/Si接口表现出脱吸.
- 这一发现表明,在这些温度下的应用中,TiCN可能不是一个合适的扩散屏障.
- 需要进一步的研究来开发更强大的扩散屏障材料.
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