使用半导体纳米线和纳米带的高性能薄膜晶体管
Xiangfeng Duan1, Chunming Niu, Vijendra Sahi
1Nanosys, Inc., Advanced Research Center, 200 Boston Ave, Medford, Massachusetts 02155, USA. xduan@nanosysinc.com
Nature
|September 19, 2003
概括
研究人员开发了高性能薄膜晶体管 (TFT) 使用纳米线或硫化纳米丝带在塑料上. 这一突破通过克服当前技术的温度限制,使先进的灵活电子技术成为可能.
科学领域:
- 材料科学 材料科学 材料科学
- 纳米技术纳米技术
- 电子工程 电子工程
背景情况:
- 薄膜晶体管 (TFT) 对宏电子非常重要,人们对柔性塑料基板越来越感兴趣.
- 现有的塑料 (无形Si,有机) 上的TFT具有诸如低载体流动性或高加工温度等局限性.
- 目前的技术阻碍了需要在灵活平台上进行计算,控制或通信的应用.
研究的目的:
- 开发高性能TFT,与塑料基板上的低温加工兼容.
- 为了实现灵活,可穿戴和一次性电子产品的新应用.
- 为先进的TFT探索除了之外的替代半导体材料.
主要方法:
- 使用面向纳米线薄膜制造TFT.
- 使用硫化纳米带作为半导体通道制造TFT.
- 在包括塑料在内的各种基板上演示的低温组装工艺.
主要成果:
- 在塑料基板上成功制造出高性能TFT.
- 开发的TFT表现出与多晶相当或超过的性能.
- 制造过程可以适应广泛的材料,包括InAs和InP等高流动性半导体.
结论:
- 定向Si纳米线和CdS纳米带TFT为塑料上的低温宏电子提供了可行的解决方案.
- 这种方法克服了现有技术的局限性,为先进的灵活电子设备铺平了道路.
- 展示的方法扩大了可用于高性能低温TFT制造的材料范围.
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