自由体积的分子设计作为通往低卡帕介电材料的途径
Timothy M Long1, Timothy M Swager
1Department of Chemistry, Massachusetts Institute of Technology, 77 Massachusetts Avenue, Cambridge, MA 02139, USA.
Journal of the American Chemical Society
|November 13, 2003
概括
带有三基子单元的新聚合物产生自由体积,降低介电常数以实现更快的集成电路. 这些材料为先进的微电子提供了低吸水率和高热稳定性.
科学领域:
- 聚合物化学 聚合物化学
- 材料科学 材料科学 材料科学
- 纳米技术 纳米技术
背景情况:
- 集成电路需要先进的绝缘材料.
- 低介电常数 (低卡帕) 材料使微处理器更快,更高效.
- 现有材料在满足下一代半导体需求方面面临限制.
研究的目的:
- 为低卡帕应用设计和合成新型聚合物.
- 为了研究三基子单元对聚合物特性的影响.
- 开发用于更快,更小的集成电路的材料.
主要方法:
- 在聚合物骨干中加入三基子单元.
- 通过多个附着点限制三角形的旋转.
- 对含有三烯和不含三烯的聚合物进行比较分析.
主要成果:
- 三烯聚合物表现出显著的自由体积引入.
- 在含有三素的聚合物中观察到减少的介电常数.
- 实现了增强的机械性能和低水吸收.
结论:
- 加入三烯是设计低卡帕材料的有效策略.
- 这些聚合物在半导体应用中具有理想的特性.
- 开发的材料支持下一代微处理器和内存设备的发展.
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